Welcome to the 2027 International Conference on Semiconductor Process and Micro/Nano Manufacturing (SPMNM 2027)! We are delighted to have you join us from August 6–8, 2027.
As semiconductor technology advances toward smaller nodes and more complex architectures, innovations in process technologies and micro/nano manufacturing are essential to sustaining the momentum of the electronics industry. SPMNM 2027 brings together leading researchers, engineers, and industry professionals from around the globe to explore cutting-edge advancements in lithography and patterning, thin-film deposition, etching, CMP, advanced packaging, and AI-driven process control.
We warmly invite you to join us in China this August for this exciting event, and look forward to your contributions and inspiring discussions.
The First Round
Abstract Submission Due: February 6, 2027
Full Paper Submission Due: February 20, 2027
Author Notification Due: April 3, 2027
Registration Due: May 15, 2027
Final Paper Submission Due: June 26, 2027
Main Conference: August 6–8, 2027
*Note: All dates refer to Beijing Time (CST, UTC+8).
Registered and presented full papers will be included in the SPMNM 2027 digital conference proceedings and submitted to major citation databases (including, but not limited to Ei Compendex and Scopus) for review and indexing.
Prospective authors are welcome to submit their research paper to SPMNM 2027 through the online submission system. (Please try to use Google Chrome if you encounter any issues during your submission or registration process. You may also contact us at 028-85575979 for any assistance.)
(to be updated)
It's necessary for all the submitted papers to adhere to the conference written paper format. For the detail format information, please download here:
Topics of Interest include but are not limited to:
| Advanced Semiconductor Process Technologies |  |
| ·EUV Lithography, Nanoimprint, and Next-Generation Patterning Technologies ·Thin-Film Deposition (CVD, PVD, ALD, etc.) ·Dry and Wet Etching Technologies ·Ion Implantation and Doping Technologies ·Chemical Mechanical Planarization (CMP) and Surface Engineering ·High-k/Metal Gate, Contact, and Interconnect Technologies ·Semiconductor Cleaning and Contamination Control ·Process Integration and Device Fabrication Flow Optimization ·Epitaxial Growth and Strain Engineering ·Silicon-on-Insulator (SOI) and Advanced Substrate Technologies ·Thermal Processing and Rapid Thermal Annealing (RTA) ·Defect Engineering and Process-Induced Damage Control |
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| Micro/Nano Manufacturing, Metrology, and Advanced Applications |  |
| ·Micro/Nano Fabrication Techniques (Electron-Beam, Focused Ion Beam, etc.) ·MEMS/NEMS Fabrication and Integration Technologies ·Nanoimprint Lithography and Self-Assembly for Nanomanufacturing ·3D Integration, TSV, and Through-Silicon Interconnect Technologies ·Advanced Packaging and Heterogeneous Integration ·Metrology, Inspection, and Defect Characterization (SEM, TEM, AFM, etc.) ·Process Control, Yield Enhancement, and Statistical Process Control (SPC) ·Machine Learning and AI in Semiconductor Manufacturing ·In-Situ Monitoring and Fault Detection for Process Optimization ·Failure Analysis and Root Cause Identification ·Atomistic Simulation and TCAD for Process and Device Modeling ·Nano-Enabled Devices and Emerging Applications (Flexible Electronics, Sensors, etc.) ·Advanced Substrates (Glass, Flexible, and Compound Semiconductor Substrates) |
Submit your abstract or full paper proposal to SPMNM 2027.
SPMNM 2027 CFP is available, please click here to view details.
We invite all interested researchers, scholars, students, engineers, and industry professionals to join us at this exciting event.
SPMNM 2027 will be held in China from August 6 to 8, 2027.
July 16, 2027 (Day 1)
Registration & Conference Kits Collection
July 17, 2027 (Day 2)
Opening Ceremony, Keynote Speeches & Parallel Sessions
July 18, 2027 (Day 3)
Excursion/Social Event
The Best Papers will be nominated by the Award Committee from among the Oral and Poster sessions. The winners of these awards will be announced at the closing ceremony.
If you are interested in giving presentation on conference without paper publication, you can attend the conference as a Presenter. As presenter, you are supposed to submit an abstract before registration. For further information, please contact us at email@spmnm.org. Your application will be processed within 3 working days.
